The fabrication of integrated quantum emitter-optical nanocavity systems is a pivotal step for the realization of innovative nanophotonic applications and devices, such as quantum computing, quantum key distribution, nano-lasers, efficient single-photon emitters etc., as well as for fundamental studies on cavity quantum electrodynamics (cavity-QED).
We developed a novel lithographic approach for the deterministic coupling of site-controlled quantum dots (QDs) with photonic crystal (PhC) nano-cavities. Site-controlled QDs are fabricated by exploiting the unique hydrogen’s ability to tailor the band gap energy of dilute nitride semiconductors (e.g. GaAsN) at the nanometer scale thanks to a spatially selective hydrogenation of the sample [Adv. Materials 23, 2706 (2011)]. The realized QDs emit single-photons in the near-infrared region, being the wavelength (900-1100 nm) easily tuned by controlling the nitrogen concentration. The deterministic integration of the realized site-controlled QDs with PhC nanocavities is achieved by exploiting the inherent realignment precision (~20 nm) between successive lithographic steps of the electron beam lithography system used for the fabrication of both QDs and PhC cavities.
Optical properties of
the realized integrated systems are investigated by photoluminescence and time
Giorgio Pettinari firstname.lastname@example.org
Annamaria Gerardino email@example.com