Hot plates and ovens

    Oxidation and annealign ovens
    Wire Bonder


Resist spinners

Two spin coating systems are dedicated to photoresists and electron resists, respectively



TENCOR 500 Profilometer

Chemical hoods

Etching and Resist development benchs


Optical microscopes

Two stereo microscopes (Olympus and Nikon) are in the yellow room.

The Olympus is equipped with a digital camera and flash-memory to take pictures. Photocameras are also available.

An additional  stereo microscope is in the e-beam lithography room; it is equipped with a video camera.