Veeco D3100 SPM with Nanoscope IIIa controller


SPECIFICATIONS

Scanner and stage:
- XY max scan area: 90 um
- Z range approx. : ~4.7 um
- Max sample size: up to 150mm diameter wafers

Vacuum chuck holder for semiconductor wafers 

Optical Microscope with motorized zoom and focus

Vibration isolation (Silicone vibration pad, Vibration isolation table)

SPM techniques commonly used:
Contact Mode
- Lateral Force Microscopy (LFM)
- TappingMode™ 
- PhaseImaging™ 
- Nanolithography (Local Oxidation, Mechanical Scratching)

Scanning techniques available:
-Magnetic Force Microscopy (MFM)
- LiftMode™
- Electric Force Microscopy (EFM)
- Non-contact Mode
- Nanoindenting
- Force Modulation

Probes available:
  • Silicon nitride contact mode probes: 4 probes with 0.06, 0.12, 0.32 and 0.58 N/m approximate force constants
  • Single crystal silicon cantilever and tip for Tapping Mode: single probe with ~ 40 N/m approximate force constants (Resonant Frequency ~ 280 kHz), nominal tip radius of curvature 5 - 10nm.
  • Single crystal silicon cantilever and tip for Contact Mode: single probe with ~ 0.1 N/m approximate force constants, nominal tip radius of curvature 5 - 10nm.
  • Single crystal silicon cantilever and tip for Hybrid Contact and Tapping Mode: single probe with ~ 2 N/m approximate force constants (Resonant Frequency ~ 40 kHz), nominal tip radius of curvature 5 - 10nm.
  • Home made oxide sharpened probes