LaB6 Scanning Electron Microscope


  • LaB6 Scanning Electron Microscope
  • HT 0.2-30kV
  •  Resolution 2nm@30kV

Veeco D3100 SPM with Nanoscope IIIa controller

Scanner and stage:
- XY max scan area: 90 um
- Z range approx. : ~4.7 um
- Max sample size: up to 150mm diameter wafers

Vacuum chuck holder for semiconductor wafers 

Optical Microscope with motorized zoom and focus

Vibration isolation (Silicone vibration pad, Vibration isolation table)

SPM techniques commonly used:
Contact Mode
- Lateral Force Microscopy (LFM)
- TappingMode™ 
- PhaseImaging™ 
- Nanolithography (Local Oxidation, Mechanical Scratching)

Scanning techniques available:

-Magnetic Force Microscopy (MFM)
- LiftMode™
- Electric Force Microscopy (EFM)
- Non-contact Mode
- Nanoindenting
- Force Modulation