The Nanofabrication facility at IFN-Rome is located in a 250 square meters, 100-1000 class (ISO5 - ISO6) clean room. The facility is devoted to the fabrication of advanced optoelectronics components, microsystems and solid state devices and detectors. The core equipments include a wide range of fabrication (e-beam lithography, photolithography and thin-film technology) as well as nano-diagnostic tools.